[{"d":"M16 16H0V0h16v16zM1 15h14V1H1v14zm13-5H5V2h9v8zM6 9h7V3H6v6z"},{"opacity":".5","d":"M10 5H9V4h1v1zm0 1H9v1h1V6zm0 2H9v1h1V8z"},{"opacity":".25","d":"M6 9h3V8h1v1h3V3H6v6zm3-5h1v1H9V4zm0 2h1v1H9V6z"}]